A Comparitive Analysis on Nanowire Based MEMS Pressure Sensor
This paper compares a MEMS Piezoresistive pressure sensor which utilizes a circular and square shaped polysilicon diaphragm with a nanowire to enhance the sensitivity of the pressure sensor. The nanowires for both the sensors form the bridge between the diaphragm assembly. The high Piezoresistive effect of polysilicon nanowires is used to enhance the sensitivity. The circular and square shaped polysilicon diaphragm with nanowire which are like piezoresistor were fabricated by means of RIE(reactive ion etching). This paper describes the performance analysis, structural design and fabrication of piezoresistive pressure sensor using simulation technique.