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Diamond coatings were prepared on mono-crystalline silicon by the hot filament chemical vapor deposition. The mechanical properties of the diamond coatings related with the micro-hardness measurement and the elastic modulus measurement were evaluated by using a nano-indenter system. The influence of the technical parameters such as methane volume ratio, substrate temperature and vacuum room pressure on the mechanical properties of diamond coatings was studied. The results showed that the micro-hardness and elastic modulus of the coating would both decrease with too high or too low substrate temperature, vacuum room pressure or volume ratio of methane.
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