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Wireless sensors incorporated in RFID systems are important in several industrial, consumer and logistics applications. By extending RFID tags to sensing applications, the products become smarter. Application areas for these smart tags include; health care (verification of the environmental conditions during transport or in storage of e.g. diapers, bandages, etc.), food monitoring (food quality during transport, storage and sales) and construction industry (e.g. building material). In this paper, a small, very low power and low cost humidity sensor tailor made for passive RFID applications is presented. The sensor consists of a glass chip substrate with a sub-micron interdigitated gold electrode structure covered with a humidity sensitive polyimide layer. The humidity absorbed by the sensing layer is measured capacitively.
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