Download now Free registration required
This paper proposes a compact, energy-efficient, and smart gas sensor platform technology for Ubiquitous Sensor Network (USN) applications. The compact design of the platform is realized by employing Silicon-On-Insulator (SOI) technology. The sensing element is fully integrated with SOI CMOS circuits for signal processing and communication. Also, the micro-hotplate operates at high temperatures with extremely low power consumption, which is important for USN applications. ZnO nanowires are synthesized onto the micro-hotplate by a simple hydrothermal process and are patterned by a lift-off to form the gas sensor.
- Format: PDF
- Size: 1546.24 KB