Towards Understanding Architectural Tradeoffs in MEMS Closed-Loop Feedback Control

Micro-Electro-Mechanical Systems (MEMS) combine lithographically formed mechanical structures with electrical elements to create physical systems that operate on the scale of microns. However, the physical scale of MEMS devices can make controlling them computationally challenging because the time constants involved are often several orders of magnitude faster than macro-scale devices and because they often require very low power operation. In this paper the authors begin an examination of the suitability of two different digital signal processors to the high-speed closed loop control problems faced by this new and growing domain.