A Vibration-Based MEMS Piezoelectric Energy Harvester and Power Conditioning Circuit

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Provided by: MDPI AG
Topic: Hardware
Format: PDF
The use of wireless sensors and implanted medical electronic systems has developed rapidly in recent years. This paper presents a Micro-Electro-Mechanical System (MEMS) piezoelectric power generator array for vibration energy harvesting. A complete design flow of the vibration-based energy harvester using the Finite Element Method (FEM) is proposed. The modal analysis is selected to calculate the resonant frequency of the harvester and harmonic analysis is performed to investigate the influence of the geometric parameters on the output voltage.
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