Capacitive Micro Pressure Sensor Integrated with a Ring Oscillator Circuit on Chip

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Provided by: MDPI AG
Topic: Hardware
Format: PDF
In this paper, the authors investigate a capacitive micro-pressure sensor integrated with a ring oscillator circuit on a chip. The integrated capacitive pressure sensor is fabricated using the commercial CMOS (Complementary Metal-Oxide Semiconductor) process and a post-process. The ring oscillator is employed to convert the capacitance of the pressure sensor into the frequency output. The pressure sensor consists of 16 sensing cells in parallel. Each sensing cell contains a top electrode and a lower electrode and the top electrode is a sandwich membrane. The pressure sensor needs a post-CMOS process to release the membranes after completion of the CMOS process.
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