Carbon Nanotube Integration with a CMOS Process

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Provided by: MDPI AG
Topic: Hardware
Format: PDF
The development of Carbon NanoTube (CNT) sensors has been the subject of intense research in recent years. Due to their unique physical and electrical proprieties, CNT sensors have been shown to be good sensing elements for pressure, alcohol, gases and biological molecules. CNT sensors are mostly manufactured using basic lithography processes, in which reproducibility and resolution are limited to the manufacturing laboratory, making it difficult to scale up to volume manufacturing. Here, the authors use Complementary Metal-Oxide Semiconductor (CMOS) technology to manufacture Single Wall Carbon NanoTube (SWCNT) sensors.
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