Institute of Electrical and Electronics Engineers
This paper presents different grades of CVD diamond substrates and the comparison between them, especially between the natural and other kind of CVD diamond. Dielectric strength investigation and surface conductivity with or without chemical treatment are presented, then the influence of the metal to diamond interface on the electronic properties have been investigated. Interdigitated planar contacts and plane back contacts have been photolithographically deposited on each sample, using different layered metals. The I(V) measurement allows determining the optimal metallization for electronic applications. Finally, we investigate the response of Metal-Diamond-Silicon components under UV illumination.