Current status of MEMS-IDT Based Surface Acoustic Wave Devices for Hydrogen and Vacuum Sensing Applications
Surface acoustic wave devices offer solutions to several current technical problems in different research areas including gas and vacuum sensing, gyroscopes, accelerometers, medical engineering, radio frequency interrogation units etc. These devices employ MEMS-IDT technology. Hydrogen is one of the possible alternates to conventional fuel used in automobiles. Hydrogen leak detection is the challenging task for the commercialization of the hydrogen fuel based auto-mobiles. It has been demonstrated recently that it is possible to detect the hydrogen leakage in very wide range from 10 ppm up to 100% by employing newly discovered diffraction free surface acoustic wave propagation technique on 1 mm quartz ball.