Electrostatically Tunable Piezoelectric-on-Silicon Micromechanical Resonator for Real-Time Clock

Provided by: Institute of Electrical and Electronics Engineers
Topic: Hardware
Format: PDF
In this paper, the authors report on the design, fabrication and characterization of a small form factor, piezo-electrically transduced and tunable micromechanical resonator for Real-Time Clock (RTC) applications (32.768KHz). The device was designed to resonate in an out-of-plane flexural mode to simultaneously achieve low-frequency operation and reduced motional resistance in a small die area. Finite element simulations were extensively used to optimize the structure in terms of size, insertion loss, spurious-mode rejection and frequency tuning.

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