Fabrication and Characterization of CMOS-MEMS Thermoelectric Micro Generators

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Provided by: MDPI AG
Topic: Hardware
Format: PDF
With the development of electronic production processes, consumer electronic devices have become smaller and more portable. Power is an important issue for electronic devices. Micro-generators can be applied in electronic devices providing additional power. The function of micro generators is not only to produce electric power but also to recycle and reuse waste energy. Many kinds of energy can be converted into electric power, for instance, wind power, thermal power, water power, chemical energy, and nuclear energy. However, some energies cause environmental pollution and are not stable sources.
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