Integrated Inductors for RF Transmitters in CMOS/MEMS Smart Microsensor Systems

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Provided by: MDPI AG
Topic: Hardware
Format: PDF
In this paper, the authors present the integration of an inductor by Complementary Metal-Oxide Semiconductor (CMOS) compatible processes for integrated smart micro-sensor systems that have been developed to monitor the motion and vital signs of humans in various environments. Integration of Radio Frequency (RF) transmitter technology with Complementary Metal-Oxide-Semiconductor/Micro-Electro-Mechanical System (CMOS/MEMS) micro-sensors is required to realize the wireless smart micro-sensors system. The essential RF components such as a Voltage Controlled RF-CMOS Oscillator (VCO), spiral inductors for an LC resonator and an integrated antenna have been fabricated and evaluated experimentally.
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