Modeling and Fabrication of Micro FET Pressure Sensor with Circuits

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Provided by: MDPI AG
Topic: Hardware
Format: PDF
In this paper, the authors present the simulation, fabrication and characterization of a micro-FET (Field Effect Transistor) pressure sensor with readout circuits. The pressure sensor includes 16 sensing cells in parallel. Each sensing cell that is circular shape is composed of an MOS (Metal Oxide Semiconductor) and a suspended membrane, which the suspended membrane is the movable gate of the MOS. The CoventorWare is used to simulate the behaviors of the pressure sensor, and the HSpice is employed to evaluate the characteristics of the circuits.
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