Nanocrystalline ZnO based MEMS Gas Sensors with CMOS ASIC for Mining Applications

Provided by: International Journal on Smart Sensing and Intelligent Systems
Topic: Hardware
Format: PDF
In this paper, the authors reported a nanocrystalline (nc) zinc oxide based hybrid gas sensor with signal conditioning ASIC for sensing and transmitting the information about methane concentration from the underground coalmine environment. A low power, low temperature nc zinc oxide MEMS based gas sensor has been designed, fabricated and tested for the purpose with a power consumption of ~70mW and sensitivity of 76.6 % at 1.0% methane concentration at a sensor operating temperature of 1500C.

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