Performance and Stress Analysis of Metal Oxide Films for CMOS-Integrated Gas Sensors

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Provided by: MDPI AG
Topic: Hardware
Format: PDF
The integration of gas sensor components into Smartphones, tablets and wrist watches will revolutionize the environmental health and safety industry by providing individuals the ability to detect harmful chemicals and pollutants in the environment using always-on hand-held or wearable devices. Metal-oxide gas sensors rely on changes in their electrical conductance due to the interaction of the oxide with a surrounding gas. These sensors have been extensively studied in the hopes that they will provide full gas sensing functionality with CMOS integrality.
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