Process Mining Applied to the Test Process of Wafer Steppers in ASML

Provided by: Institute of Electrical & Electronic Engineers
Topic: Big Data
Format: PDF
Process mining techniques attempt to extract nontrivial and useful information from event logs. For example, there are many process mining techniques to automatically discover a process model describing the causal dependencies between activities. Several successful case studies have been reported in literature, all demonstrating the applicability of process mining. However, these papers refer to rather structured administrative processes. In this paper, the authors investigate the applicability of process mining to less structured processes. They report on a paper where the ProM framework has been applied to the test processes of ASML (the leading manufacturer of wafer scanners in the world).

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