Journal of Semiconductor Technology and Science (JSTS)
Radio Frequency (RF) Micro-Electro-Mechanical Systems (MEMSs) have been pursued for more than a decade as a solution of high-performance on-chip fixed, tunable and reconfigurable circuits. This paper reviews the authors' paper on RF MEMS switches and switching circuits in the past five years. The paper first concentrates on the development of lateral DC-contact switches and capacitive shunt switches. Low insertion loss, high isolation and wide frequency band have been achieved for the two types of switches; then the switches have been integrated with transmission lines to achieve different switching circuits, such as Single-Pole-Multi-Throw (SPMT) switching circuits, tunable band-pass filter, tunable band-stop filter and reconfigurable filter circuits.