Settling Time Improvement of Piezoelectric Actuated Nanopositioning System Using Fuzzy Logic Based PID Controller

Large travel range with very high resolution, fast response with no or very little overshoot, extremely high precision and high bandwidth are some of the desired characteristics of any nanopositioning system. This paper presents the design and identification of nanopositioning system consisting of flexure stage, piezoelectric actuator and Linear Variable Differential Transformer (LVDT) as a sensor. Time and frequency responses of open loop nanopositioning system are analyzed and it has been observed that settling time taken by the nanopositioning system to reach at desired destination is very high.

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