Symmetric and Asymmetric Double Langmuir Probes Characterization of Radio Frequency Inductivley Coupled Nitrogen Plasma

Provided by: EMW Publishing
Topic: Mobility
Format: PDF
The symmetric and asymmetric double Langmuir probe systems with their necessary driving circuits are developed for characterization of low pressure inductively coupled nitrogen plasma, generated and sustained with 13.56MHz RF (Radio Frequency) source and an automatic impedance matching network. First of all, the plasma parameters such as ion saturation current, electron temperature and electron number density are determined with symmetric double probe system at different input RF powers, filling gas pressures and radial distance from the plasma chamber wall.

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