The State of Art Survey on Micro Cantilevers for MEMS Devices
Arrival of Micro-ElectroMechanical System (MEMS) in the last decade has been immense and ever growing. MEMS is an expanding and fast growing technology with an extensive range of applications. Micro cantilevers belongs to MEMS set of devices and are often used for detection of forces in micromechanical sensors (e.g. pressure sensors & accelerometers) and probe for force sensor to atomic force microscope used as transducers, transport mechanisms, relays, switches, resonators etc. In this paper, the relative study and recent development of different micro cantilevers which differ in the material being used and in their construction are discussed and compared to each other based on various parameters.