Journal of Semiconductor Technology and Science (JSTS)
Flash memory has become a cost-effective solid-state storage technology widely used in mobile electronics devices and other consumer applications. The NOR flash memory has typically been used for code storage and direct execution in portable electronics devices, such as cellular phones and PDAs. Since, there is no roadmap for Nano-Floating Gate Memory (NFGM) NOR application, the authors follow the roadmap for SONOS. According to the projection of the latest updated version 2006 ITRS, the SONOS NVM device for 2-bit/cell cannot be scaled down to the physical gate length below 140nm due to the charge separation issue in the nitride layer.